| 格（長×寬）mm | 精度等級 | ||||
| 0 | 1 | 2 | 3 | ||
| 平面度公差(μm) | |||||
| 200×200 | 5 | 10 | 20.5 | ||
| 200×300 | 5.5 | 11 | 22 | ||
| 300×300 | 5.5 | 11 | 22 | ||
| 300×400 | 6 | 12 | 24 | ||
| 400×400 | 6.5 | 12.5 | 25 | ||
| 400×500 | 6.5 | 13 | 26 | 66 | |
| 500×500 | 6.8 | 14 | 28 | 68 | |
| 400×600 | 7 | 14 | 27.5 | 70 | |
| 500×600 | 7 | 14.2 | 28.5 | 71 | |
| 500×800 | 8 | 15.5 | 31 | 78 | |
| 600×800 | 8 | 16 | 32 | 80 | |
| 1000×750 | 9 | 18 | 36 | 90 | |
| 1000×1000 | 10 | 20 | 40 | 97 | |
| 1000×1200 | 10 | 20.5 | 41 | 103 | |
| 1000×1500 | 11 | 22 | 45 | 112 | |
| 1000×2000 | 26 | 52 | 130 | ||
| 1500×2000 | 28 | 56 | 140 | ||
| 2000×2000 | 31 | 61 | 153 | ||
| 2000×2500 | 34 | 67 | 168 | ||
| 1500×3000 | 35 | 70 | 174 | ||
| 2000×3000 | 37 | 74 | 184 | ||
| 2000×4000 | 44 | 88 | 219 | ||
